Optical Polymer Waveguides Fabricated by Roll-to-Plate Nanoimprinting Technique

摘要

The paper reports on the properties of UV-curable inorganic-organic hybrid polymer multimode optical channel waveguides fabricated by roll-to-plate (R2P) nanoimprinting. We measured transmission spectra, refractive indices of the applied polymer materials, and optimized the R2P fabrication process. Optical losses of the waveguides were measured by the cut-back method at wavelengths of 532, 650, 850, 1310, and 1550 nm. The lowest optical losses were measured at 850 nm and the lowest average value was 0.19 dB/cm, and optical losses at 1310 nm were 0.42 dB/cm and 0.25 dB/cm at 650 nm respectively. The study has demonstrated that nanoimprinting has great potential for the implementation of optical polymer waveguides not only for optical interconnection applications.