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Fabrication of low-loss polymeric optical waveguide for multi-mode and polymer optical fibers based on hot-emboss technique

机译:基于热浮雕技术的多模和聚合物光纤制造低损耗聚合物光波导

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Simple and low cost fabrication of method polymeric optical waveguides with large core sizes for multi-mode fibers and polymer optical fibers (POFs) is presented. The waveguides are fabricated by hot-embossing using a UV-cured epoxy resin stamper. The stamper is fabricated by replication of a rectangular groove mold that is made of silicone rubber replicated from a ridge original Si master that is fabricated by anisotropic etching of a (110) single-crystal Si. The optical waveguides with large core sizes from 100 μm to 500 μm are fabricated, and low propagation loss less than 0.2dB/cm at 650 nm is realized.
机译:提出了具有大型芯尺寸的方法的简单和低成本的制造,具有多模纤维和聚合物光纤(POFS)。通过使用紫外线固化的环氧树脂压模通过热压制造波导。通过复制由硅橡胶制成的矩形槽模制的压模,该模具由由脊原型Si主母母母覆的硅橡胶制成,该硅橡胶由通过(110)单晶Si的各向异性蚀刻制成。制造具有100μm至500μm的大芯尺寸的光波导,实现了低于0.2dB / cm在650nm的低传播损耗。

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