Principle of π-phase plate long trace profiler for synchrotron radiation optics

摘要

A π-phase plate long trace profiler (πLTP) for testing aspherical optical elements in large dimension, especially the optical elements used in synchrotron radiation, is introduced. Based on the angle-to-position converting feature of a lens, a collimated diode laser beam out of a single mode optical fiber scans all the way across the surface under test (SUT). A diffracted pattern is used to precisely determine the position of the light spot on the back focal plane of the lens. A prototype based on the principle with a measurement range of 370 mm and a slope resolution of better than 0.25 μrad has been established. An accuracy of 0.7 μrad has been achieved.