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Precise measuring method for detecting the in situ distortion profile of a high-heat-load mirror for synchrotron radiation by use of a pentaprism long trace profiler

机译:使用五棱镜长迹轮廓仪检测同步辐射的高热负荷镜的原位畸变轮廓的精确测量方法

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摘要

A precise measuring method for detecting the in situ distortion profile of a high-heat-load mirror for synchrotron radiation by use of a pentaprism long trace profiler (LTP) is presented. A maximum distortion of 0.47 mu m across a length of 180 mm was measured for an internally water-cooled mirror on an undulator beam line at ELETTRA while exposed to a total emitted power of 600 W. This first successfully tested in situ distortion profile points out the importance and need for this method. Two configurations for performing in situ LTP tests are discussed. For this measurement the configuration with all the equipment external to the vacuum chamber was used. The experiment has an accuracy and a repeatability of 0.04 mu m. Suggestions for improving the accuracy and stability are presented. (C) 1997 Optical Society of America.
机译:提出了一种精确的测量方法,该方法通过使用五棱镜长迹轮廓仪(LTP)检测用于同步辐射的高热负荷镜的原位畸变轮廓。在ELETTRA的起伏器光束线上测量的内部水冷反射镜在暴露于600 W的总发射功率的情况下,在180 mm的长度上测得的最大失真为0.47μm。这是第一个成功测试的原位失真曲线这种方法的重要性和必要性。讨论了用于执行原位LTP测试的两种配置。对于该测量,使用真空室外部的所有设备的配置。实验的准确性和可重复性为0.04微米。提出了提高准确性和稳定性的建议。 (C)1997年美国眼镜学会。

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