POSITION-SENSITIVE PHOTODETECTORS IN TRIANGULATION DIMENSIONAL INSPECTION SYSTEMS FOR DYNAMIC OBJECTS

摘要

Peculiarities of using position-sensitive photodetectors in triangulation dimensional inspection systems are considered. A formula for calculating the coordinate of the center of the spot with an accuracy higher than that claimed by the producer was derived by analyzing the photodetector operation in the static mode. Problems arising in inspection of dynamic objects are considered. It is proposed to find the approximation function for determining the spot coordinate on a position-sensitive photodetector.