Producing Multicomponent SHS-Compacted Cathodes Based on Refractory Titanium Compounds for Vacuum-Arc Coatings

摘要

The technological features of and a device for manufacturing multicomponent cathodes of arc evaporators using SHS compaction are considered. Physically, an SHS-compacted cathode is a four-layer function-gradient product and consists of a metallic base in the form of a water-cooled bottom part of a regular cathode, an evaporating operating layer, an intermediate layer, and the SHS solder layer required for joining the synthesized material with the base. Compositions and weight characteristics of layers that allow us to produce defect-free multicomponent SHS-compacted cathodes based on stainless steel are presented.