METHOD FOR PRODUCING COMPOSITE CATHODES BASED ON TITANIUM SILICIDES FOR ION-PLASMA SYNTHESIS OF MULTICOMPONENT NANOSTRUCTURAL COATINGS

摘要

The invention relates to methods for producing composite cathodes for ion-plasma synthesis of multicomponent nanostructured coatings obtained by vacuum-arc and magnetron methods. The technical result of the invention allows for the electrical connection of an isomorphically spliced cathode with its electrode holder-cathode leg. According to the invention, the synthesis of titanium silicides is carried out stepwise in a composite graphite-containing crucible: at the first stage, a compacted copper-silicon charge is placed in the lower graphite-containing crucible, and a charge of the copper-titanium fractional mixture is placed in the upper crucible; at the second stage, the electric crucible is melted in the upper crucible to obtain a melt of copper-titanium components with the subsequent dissolution at 1100-1400 ° C of a stopper diaphragm plug made of compact titanium metal in the molten copper-titanium components until a low-melting hypereutectic alloy is obtained, the charge is electrically melted in the lower crucible copper-silicon to produce a hypereutectic alloy; at the third stage, the synthesis of titanium silicides is carried out with the initiation of an exothermic reaction in the titanium component until the formation of silicides is achieved at 1600-2150 ° C: up to 50% of titanium silicides with the formation of phases of titanium silicides and silicon bronze; in the fourth stage, with the inductor turned off, the intermediate product for the vacuum target is obtained by tilting the composite crucible by 180 °.