Si-Ni-Fe Alloys for Magnetron Sputtering Targets

摘要

The effect of the cooling rate on the microstructure, micromechanical properties, and thermal residual stresses of magnetron sputtering targets made of cast resistance alloys Si-10% Ni-4% Fe and Si-15% Ni-6% Fe is studied. The optimum cooling rates of castings that provide a homogeneous fine-grained structure, high strength characteristics, and the minimum level of residual stresses in the targets are found.