Coating device for depositing layers of alloys, mixtures or reaction products of different materials by magnetron sputtering has a target made from concentrically arranged partial targets each made from the material to be deposited

摘要

Coating device comprises a target and a unit producing a magnetic field. The target is made from two concentrically arranged partial targets (1, 2) each made from the material to be deposited. Separating lines run between the partial targets parallel to the pole lines of the unit producing a magnetic field. The partial targets are electrically connected. The unit producing a magnetic field contains electromagnetic coils (3, 4) assigned to the partial targets and has devices which can change the position of the magnetic pole opposite the separating lines of the partial targets.