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Direct patterning of negative nanostructures on self-assembled monolayers of 16-mercaptohexadecanoic acid on Au(111) substrate via dip-pen nanolithography

机译:通过浸渍笔纳米光刻技术在Au(111)基底上的16-巯基十六烷酸自组装单分子层上的负纳米结构的直接图案化

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摘要

Both bare and self-assembled monolayer (SAM) protected gold substrate could be etched by allyl bromide according to atomic force microscopy (AFM), x-ray photoelectron spectroscopy (XPS) and inductively coupled plasma mass spectrometric (ICPMS) analysis results. With this allyl bromide ink material, negative nanopatterns could be fabricated directly by dip-pen nanolithography (DPN) on SAMs of 16-mercaptohexadecanoic acid (MHA) on Au(l11) substrate. A tip-promoted etching mechanism was proposed where the gold-reactive ink could penetrate the MHA resist film through tip-induced defects resulting in local corrosive removal of the gold substrate. The fabrication mechanism was also confirmed by electrochemical characterization, energy dispersive spectroscopy (EDS) analysis and fabrication of positive nanopatterns via a used DPN tip.
机译:根据原子力显微镜(AFM),X射线光电子能谱(XPS)和电感耦合等离子体质谱(ICPMS)分析结果,可以用烯丙基溴蚀刻裸露的和自组装的单层(SAM)保护的金基板。使用这种烯丙基溴墨水材料,可以通过在Au(11)基板上的16-巯基十六烷酸(MHA)的SAM上通过浸涂式纳米光刻(DPN)直接制造负纳米图案。提出了一种尖端促进腐蚀的机制,其中金反应性墨水可以通过尖端引起的缺陷穿透MHA抗蚀剂膜,从而导致局部腐蚀去除金基底。通过电化学表征,能量色散光谱(EDS)分析以及通过使用的DPN尖端制造正纳米图案,也证实了该制造机理。

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