Patterning and characterization of 2D photonic crystals fabricated by focused ion beam etching of multilayer membranes

摘要

We report the modelling and characterization of 2D photonic crystals that we have successfully implemented using a well adapted technical process: focused ion beam etching of multilayer membranes. Devices have been dimensioned to operate as polarizing beam splitters at telecommunication wavelengths. Modelling the experimental observations has allowed us to characterize FIB etching performances and to propose further technological improvements.