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A scanning Kelvin probe study of charge trapping in zone-cast pentacene thin film transistors

机译:区域开并五型薄膜晶体管中电荷俘获的扫描开尔文探针研究

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We have used scanning Kelvin probe microscopy (SKPM) as a local probe to study charge trapping in zone-cast pentacene field effect transistors on both SiO2 and benzocyclobutene (BCB) substrates. Annealing at 130 degrees C was found to reduce the threshold voltage, susceptibility to negative gate bias stress and trapping of positive charges within single pentacene grains. We conclude that oxygen is able to penetrate and disassociatively incorporate into crystalline pentacene, chemically creating electrically active defect states. Screening of a positive gate bias caused by electron injection from Au into pentacene was directly observed with SKPM. The rate of screening was found to change significantly after annealing of the film and depended on the choice of gate dielectric.
机译:我们已经使用扫描开尔文探针显微镜(SKPM)作为局部探针来研究在SiO2和苯并环丁烯(BCB)衬底上的区域铸造并五苯场效应晶体管中的电荷俘获。发现在130摄氏度下进行退火可以降低阈值电压,降低对负栅极偏置应力的敏感性以及使单并五苯晶粒内的正电荷俘获。我们得出的结论是,氧气能够渗透并解离地并入结晶并五苯,从而化学地产生电活性缺陷态。用SKPM直接观察到了由电子从金注入并五苯引起的正栅极偏压的屏蔽。发现屏蔽速度在薄膜退火后有很大变化,并且取决于栅极电介质的选择。

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