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Forging of metallic nano-objects for the fabrication of submicron-size components

机译:用于制造亚微米级组件的金属纳米物体的锻造

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摘要

In recent years, nanoscale fabrication has developed considerably, but the fabrication of free-standing nanosize components is still a great challenge. The fabrication of metallic nanocomponents utilizing three basic steps is demonstrated here. First, metallic alloys are used as factories to produce a metallic raw stock of nano-objectsanoparticles in large numbers. These objects are then isolated from the powder containing thousands of such objects inside a scanning electron microscope using manipulators, and placed on a micro-anvil or a die. Finally, the shape of the individual nano-object is changed by nanoforging using a microhammer. In this way free-standing, high-strength, metallic nano-objects may be shaped into components with dimensions in the 100 nm range. By assembling such nanocomponents, high-performance microsystems can be fabricated, which are truly in the micrometre scale (the size ratio of a system to its component is typically 10:1).
机译:近年来,纳米级制造取得了长足的发展,但是独立式纳米级组件的制造仍然是一个巨大的挑战。这里展示了利用三个基本步骤的金属纳米组件的制造。首先,金属合金被用作工厂,以大量生产纳米物体/纳米粒子的金属原料。然后使用操纵器在扫描电子显微镜内将这些物体与包含成千上万个此类物体的粉末隔离开,并放置在微型砧或模具上。最后,使用微锤通过纳米锻造改变单个纳米物体的形状。通过这种方式,可以将独立的,高强度的金属纳米物体成型为尺寸在100 nm范围内的组件。通过组装这样的纳米组件,可以制造高性能的微型系统,这些系统真正处于微米级(系统与其组件的尺寸比通常为10:1)。

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