MEASUREMENT OF STATIC PRESSURE OVER BODIES IN HYPERSONIC SHOCK TUNNEL USING MEMS-BASED PRESSURE SENSOR ARRAY

摘要

This paper reports on development of MEMS based pressure sensors arrays for static pressure measurement on aerodynamic surfaces. The two different types of sensors arrays with cluster of 25 sensors and 5 sensors are developed. The characterization of pressure sensors arrays carried out in static condition and the working of sensors has been demonstrated for hypersonic flows in shock tunnel with the cluster of 5 sensors array. The static pressure measured using the MEMS sensors in shock tunnel testing are in good agreement with conventional Kulite sensors.