基于MEMS压力传感器阵列的浪涌检测技术研究

摘要

A surge detection technique based on MEMS pressure sensor array is introduced.Through placing MEMS pressure sensor array in pressure area,so as to obtain pressure value of each test point,these pressure values are processed to get the pressure change trend of the corresponding area.The MEMS pressure sensor array detection test system verify that this design scheme can accurately detect surge signal,distinguish direction and amplitude change of surge.%提出了一种基于微机电系统(MEMS)压力传感器阵列的浪涌检测技术.通过在压力作用区域内布放MEMS压力传感器阵列,从而获取各测试点上的压力值,对这些压力值进行处理得到相应区域的压力变化趋势.经MEMS压力传感器阵列检测实验系统验证表明:此设计方案能够准确检测到浪涌信号,分辨出浪涌的方向及幅值变化.