STUDY OF ACCURACY OF A LONG-TRAVEL-RANGE, ULTRA-HIGH-RESOLUTION, HYBRID-DRIVE TRANSLATIONAL STAGE USING LASER INTERFEROMETER

摘要

The performance of micro-meso machine tools is profoundly affected by its position accuracy and built-in motion error of the machine tool. Further, errors in position and orientation in a multi-axis machine are the results of errors in the individual links of the machine and the interactions between them. Therefore it is very important to study the individual stage movements before it is assembled in the machine tools. In this study, the linear and angular errors of a hybrid-drive translational stage has been examined with a laser interferometer.