Modulation of excitation signal as a method for measurement of the mechanical properties of miniature piezoelectric resonant devices in a viscous and conductive environment

摘要

A novel approach to electric measurement of mechanical properties of piezoelectric resonators is presented. Modulation of the actuation signal and application of dedicated, in-house built readout electronics makes it possible to precisely analyse resonance response of low-frequency piezoelectric devices in conductive and viscous environment. The method presented is inexpensive and allows us to measure highly damped piezoelectric resonator properties without being influenced by the parasitic elements present in the resonator structure or due to the properties of the environment.