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Effective dielectric and elastic properties of nanoporous low-κ media

机译:纳米多孔低κ介质的有效介电和弹性

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This paper presents a mathematically defined characterization of random porous media including random self-similarity and surface fractality. The initial two-phase structure is transformed into a three-phase system by introducing the internal surface layer as the third phase. Effective medium theories are utilized to calculate macroscopic dielectric and elastic properties. The dependence of both the static dielectric constant and Young's modulus on geometrical parameters is analyzed for different combinations of bulk and interface properties. It is shown that the modification of the properties of the internal surface layer is a promising way to improve the effective constants of the materials. The obtained analytical expressions are also used to determine confined regions in the space of structural parameters where pre-specified property combinations are realized. The results are discussed in terms of possible applications of nanometer-scale porous interlayer dielectrics with an ultralow dielectric constant and sufficient mechanical stiffness for future semiconducting devices.
机译:本文介绍了随机多孔介质的数学定义特征,包括随机自相似性和表面分形性。通过引入内表面层作为第三相,将初始的两相结构转换为三相系统。有效的介质理论用于计算宏观介电和弹性特性。对于体积和界面性质的不同组合,分析了静态介电常数和杨氏模量对几何参数的依赖性。结果表明,改变内表面层的性能是提高材料有效常数的一种有前途的方法。所获得的解析表达式还用于确定结构参数空间中的限制区域,在这些区域中可以实现预定的特性组合。将就具有超低介电常数和足够机械刚度的纳米级多孔层间电介质在未来半导体器件中的可能应用进行讨论。

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