FABRICATION AND PERFORMANCE OF HIGH TEMPERATURE STYLE FUNCTIONALLY GRADED PIEZOELECTRIC BENDING ACTUATORS

摘要

To avoid the delamination of bimorph actuator and enhance the performance of the roomtemperature type functionally graded (RTFG) piezoelectric bending actuator, the high temperature type FG (HTFG) piezoelectric bending actuator was designed and fabricated. The material compositions with different dielectric and piezoelectric constants were selected from the Pb(Ni_(1/3)N_(b2/3)0_3-PbZr0_3-PbTiO_3 (PN-PZ-PT) family, and used as the five layers in the HTFG piezoelectric actuator. Compared with the FG actuator, the HTFG actuator has advantages for applications at high temperature. The durability of the fabricated HTFG piezoelectric actuators was measured in a vibration test and compared with that of the bimorph actuator to evaluate the improvement of performance. The results show that the durability of the HTFG piezoelectric actuators is much higher than that of the bimorph actuator.