Fabrication of photoplastic high-aspect ratio microparts and micromolds using SU-8 UV resist

摘要

An innovative method for fabrication and rapid prototyping of high-aspect ratio micromechanicalcomponents in photoresist is discussed. The photoresist is an epoxynegative-tone resist, called SU-8,which can be structured to more than 2 mm in thickness by UV exposure. Small gears of 530μm indiameter and 200μm in thickness have been realized in this photoplastic and their functionality hasbeen demonstrated. In addition a process called MIMOTEC{sup}TM (MIcroMOlds TEChnology)has been established for the fabrication of metallic micromolds. MIMOTEC{sup}TM is based on theuse of the SU-8 spun on high thicknesses and electrodeposition of nickel. Thermoplasticmicrocomponents have been injected and mounted in watches.