Multiwalled carbon nanotube-polyimide nanocomposite for MEMS piezoresistive pressure sensor applications

摘要

Multiwalled carbon nanotube (MWCNT)-polyimide (PI) nanocomposite was prepared with different MWCNT concentrations and characterized for their pi-ezoresistive response. The morphology and mechanical behavior of the nanocomposite was investigated by scanning electron microscopy and force-displacement spectroscopy respectively. The surface conductivity of the nanocomposite was determined by atomic force microscopy in current mode. Studies reveal that this nanocomposite will be useful for strain-sensing element in micro electro mechanical system (MEMS)ano electro mechanical system (NEMS) based piezoresistive pressure sensor applications. The study shows that the nanocomposite with 2% MWCNT content is a unique piezoresistive sensing element for MEMS/NEMS pressure sensor.