An electrothermal equation of a polysilicon thermal flexure actuator is presented, which takes heat conduction, air convection and radiation into account. A numerical method is developed to solve the equation. The deflection model based on the matrix displacement method, i.e. finite element method (FEM) in structural mechanics, is given. It transforms deflection equations into a matrix and is easy to calculate numerically. Simulation results for the actuator with typical dimensions are presented. Discussions are finally given.
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