Quality based design approach for a single crystal silicon microactuator using DOE technique and response surface model

摘要

This paper discusses the use of DOE technique and response surface model as an efficient quality based design approach to optimize coupled electromechanical behavior of a single crystal silicon micro-actuator for hard disk drives (HDD). A number of experiments for different settings of the microactuator parameters are planned and analyzed. The fitted response surface models are built using the regression technique. Finite element method (FEM), boundary element method (BEM) and optimization techniques are utilized to predict and verify the microactuator performance. Example results show that the proposed approach is effective to guide microactuator design to achieve a robust and reliable design in a most efficient way.