The Effect of TiC Transient Layer on a DLC-Based Functionally Gradient Coating Prepared by Closed Field Unbalanced Magnetron Sputtering Plating System

摘要

Recently, Diamond like carbon (DLC)-based functionally gradient coatings have been used in a variety of　engineering applications as useful films with appropriate tribological properties verified in many tests. However,　due to their inherent residual stresses, they have a tendency to peel off, thereby limiting their applications　(involving high contact stresses) and deposition thickness. Their brittleness and low adhesion may stem from　either a faulty layer design or the wrong choice of material and deposition method. Therefore, using both a suitable interleaving material and an appropriate deposition technology will create an inclusive vision to　accommodate better film properties. In this study, Ti-a:C and Ti-TiC-a:C films on AISI M2 steel substrates　were deposited by Closed Field Unbalanced Magnetron Sputtering (CFUBMS) method using pulsed-dc biasing,　and the mechanical, the structural, and the tribological properties for both films were investigated. It was　seen that the incorporation of a TiC buffer layer between the Ti interlayer and the a:C matrix played a positive　role in terms of hardness, wear rate, and adhesion properties.