Fabrication and Characterization of Micromachined Accelerometers Based on PZT Thin Films

摘要

In this paper the simple accelerometers based onPZT thin films were developed and characteried. The functions ofseismic mass and spring are given by a boss loaded cantileverstructure. The strain of the cantilever is detected by a Pb(Zr,Ti)O_3 thin film. A 2 mm long and 0.8 mm wide cantileveryielded a response of 0.6mV/g* in the frequency interval between1 and 600 Hz. With #DELTA#f=600Hz a limit of about 1 mg* at1Hz, and less above this frequency, was observed. The responsepredicted by the analytical model is close to the actual response ofthe device. A working miniaturized accelerometer prototype couldbe thus demonstrated.