Measurements of Piezoelectric Properties of Ferroelectric Thick Films by Fotonic Sensor

摘要

A development of method of piezoelectric measurements of thick film and bulk samples by a commercially available Fotonic Sensor? is reported. The main problem of using this technique is a high requirement to the electrode quality and an overestimation of the piezoelectric coefficients due to bending effects. In this work, both problems were successfully solved by using special mechanical interface (cantilever beam) that transfers mechanical displacement from the moving piezoelectric surface to the mirror. The capabilities of the piezoelectric measurement setup are validated by the measurements in both bulk ceramics and thick Pb(Zr,Ti)O_3 films.