FERROELECTRIC THIN FILM, FERROELECTRIC THIN FILM ELEMENT, PIEZOELECTRIC ACTUATOR, PIEZOELECTRIC SENSOR, HEAD ASSEMBLY, HEAD STACK ASSEMBLY, HARD DISK DRIVE, PRINTER HEAD AND INKJET PRINTER DEVICE

摘要

To provide a ferroelectric thin film excellent in ferroelectricity, and having suppressed crack.SOLUTION: A ferroelectric thin film 3 includes a metal oxide, and the metal oxide contains hafnium, and the metal oxide contains a crystal phase having a fluorite type crystal structure. The crystal phase is either or both of orthorhombus and tetragonal, and a (111) plane of a part of the crystal phase is oriented in a normal direction dn on the surface of the ferroelectric thin film 3, and a (100) plane of another part of the crystal phase is oriented in a normal direction dn on the surface of the ferroelectric thin film 3.SELECTED DRAWING: Figure 1