Growth and Micro-Raman Study of RF Magnetron Sputter Deposited PbTiO3 Thin Films

摘要

PbTiO_3 thin films have been prepared on Si <100> and MgO <100> substrates using sequential RF magnetron sputtering of Pb and Ti targets. As deposited films were post annealed in the presence of oxygen to get PbTiO_3 phase. Films were characterized using Xrd, SEM, XPS and temperature dependent Micro-Raman studies. Micro-Raman spectra were obtained from 75K to 550K. We have investigated the low temperature phase transitions and noticed that there is a possible evidence for the structural phase transitions in our low temperature Raman data of the polycrystalline PT films.