Design and Modeling of Piezoelectric Pump for Microfluid Devices

摘要

Recently, there has been increased incessantly an interest in research area on microflu-idic pump for electronic and biological applications. The proposed pump takes an unobtrusive operation into the simple displacing mechanism using peristaltic traveling waves without the physical moving valves. However, this piezopump makes up a radical design, based on the operation of the stator on the piezoelectric motor. The ATILA simulation performs to estimate the operating frequency of the vibrating wave mode, and optimize the design conditions of piezopump such as pump structure, elastic materials, piezoelectric ceramics, and z-displacement on the elastic traveling wave of piezopump. The best measured value of the pumping rate is about 118 mu l/min under the following parameters: 4-wave mode, the operating frequency of 50 kHz and the peak voltage of 200 V.