X-ray fluorescence analysis of chalcogenide glass with electron beam fluorescence excitation

摘要

The method of X-ray fluorescence analysis with the fluorescence excitation by an electron beam with 30 keV energy was used to determine the germanium, arsenic, and selenium content in the Ge1-x Se (x) , As1-x Se (x) , and Ge1-x-y AsySe (x) glassy alloys. This technique allows determining the quantitative glass composition with an accuracy of +/- 0.0002 in the surface layer of a depth of similar to 0.1 mu m from parameters x and y of the linear calibration dependences.