The present invention has been done, by an x-ray beam fluorescence analyzer and the like, without great effort which a sample analysis including materials with multilayer structure in samples low the direction at a low cost without a need for a highly developed art and time can execute. An x-ray beam fluorescence analysis method according to the present invention, which material analysis including a sample of the different materials with more compartment layer structure, the materials of the analyzed by irradiating the sample with an x-ray beam, in order to achieve an x-ray beam fluorescence can be seen; estimates a samples machining circumference, based on an analysis resu and performs a sample handling, based on the working circumference, which is in the working circumference estimation step is estimated.
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