Processing techniques for photostructurable glasses

摘要

Photostructurable glasses have been known for a long time. Through miniaturization they can be used as micromechanical components, e.g. sensors, grippers, additional components for analytical instruments, microactuators, fluid and optical components, and numerous other applications. At the Technical University of Ilmenau (Department of Glass and Ceramic Technology) various photostructurable glasses have been developed in the last decade. Additionally, many process-technical investigations were carried out. As a result of these investigations specific parameters were determined creating a basis for the conception of a modular system for the fully automated production of micromechanical glass components. The modular system consist of three modules for the main steps of the process: exposure module, curing and etching module. Additionally there is a cleaning process integrated in a separate part of the exposure module. The application of the glass wafers is realized by an input magazine, the processed wafers are placed in au output magazine. The system is calculated for small and medium-sized companies and the processing of 10 000 wafers per year.