lithography lessons

摘要

The semiconductor industry has grown from its origins in the 1960s to the multi billion dollar industry of today, with silicon chips found virtually everywhere in modern society. The birth of the integrated circuit (IC) – a miniature electronic circuit made up of a number of transistors integrated ontoa semiconductor substrate – revolutionisedthe electronics industry and since then,improvements in fabrication methods haveallowed smaller chips to be made incorporatinggreater numbers of transistors.