Electron Beam Induced Degradation of CaS:Pb Thin Film Phosphor Grown by Atomic Layer Deposition

摘要

The effects of electron (e)-beam irradiation on the luminescent and the materials properties of CaS:Pb films were investigated using structural and compositional analysis techniques. Continuous c-beam irradiation on CaS:Pb thin film for 180 min resulted in an approximately 60 percent decrease of cathodoluminescence (CL) intensity. Transmission electron microscopic analysis indicated that e-beam irradiation induced the precipitation of Pb. The decrease of CL intensity by e-beam irradiation was mostly caused by the decrease of Pb~(2+) luminescent center ion concentration due to the precipitation of Pb. E-beam irradiation also resulted in heavy carbonaceous contamination on the surface. The thickness of the carbonaceous layer was approximately 10 nm.