EM RESOLUTIONS INTRODUCES MAGNIFICATION STANDARDS

摘要

EM Resolutions (Essex, U.K.) has extended its range of resolution and magnification standards for scanning electron microscopy (SEM) with the introduction of the EM-Tec MCS and M series of magnification calibration standards. These fully featured practical calibration standards have been specially developed for magnification calibration or critical dimension measurements in tabletop SEM, standard SEM, field emission gun SEM (FEGSEM), focused ion beam (FIB), Auger, secondary ion mass spectrometry, and reflected-light microscope systems.