Optical Axis Alignment for Three-Aspherical Mirrors System Using Five Parallel Laser Beams and Moire Method

摘要

In this paper, a new optical technique involving the five parallel laser beams alignment device and moire method was developed to rapidly and accurately align the optical axis of three-aspherical mirrors system (TAMS). In this method, the optical axis of a first aspherical mirror is made parallel to the "five incident parallel laser beams" in the plane of incidence. The height and orientation of the first aspherical mirror are fine tuned and the alignment is assured by examining the direction of these five reflected laser beams. The optical axes of second and third aspherical mirror are aligned by five parallel laser beams in accordance with the configuration parameter of optical system in sequence. The effective focal length (EFL) of the TAMS was measured by moire method and image formula. This novel method is used to align the optical axis of TAMS and the EFL deviation estimated has an accuracy of 1%.