Influence of Accelerating Force on the Electromechanical Instability of Paddle-Type and Double-Sided Sensors Made of Nanowires

摘要

The double-sided and paddle-type nanostructures are promising for developing miniature accelerometers. In the present work, the impact of the accelerating force on the pullin performance of the double-sided and paddle-type sensors fabricated from nanowire are investigated. The proximity force approximation (PFA) is employed to consider the effect of Casimir attraction in the theoretical model. Using the modified couple stress theory, the constitutive equations of the sensors are derived. The governing equations are solved by two different approaches, i.e. modified variational iteration method (MVIM), and finite difference method (FDM). The influences of the Casimir and accelerating forces, geometrical parameters and the size phenomenon on the pull-in parameters are demonstrated.