The size-dependent electromechanical instability of double-sided and paddle-type actuators in centrifugal and Casimir force fields

摘要

The present research is devoted to theoretical study of the pull-in performance of double-sided and paddle-type NEMS actuators fabricated from cylindrical nanowire operating in the Casimir regime and in the presence of the centrifugal force. D'Alembert's principle was used to transform the angular velocity into an equivalent static, centrifugal force. Using the couple stress theory, the constitutive equations of the actuators were derived. The equivalent boundary condition technique was applied to obtain the governing equation of the paddle-type actuator. Three distinct approaches, the Duan-Adomian Method (DAM), Finite Difference Method (FDM), and Lumped Parameter Model (LPM), were applied to solve the equation of motion of these two actuators. This study demonstrates the influence of various parameters, i.e., the Casimir force, geometric characteristics, and the angular speed, on the pull-in performance. (C) 2017 Sharif University of Technology. All rights reserved.