A size-dependent model for instability analysis of paddle-type and double-sided NEMS measurement sensors in the presence of centrifugal force

摘要

Paddle-type and double-sided nanostructures have much potential for measuring the angular speed in rotary systems and aerospace applications. While most investigations in the literature have concentrated on the electromechanical performance of conventional beam-type nanostructures, few researchers have addressed the performance of these systems. The pull-in instability of the cantilever paddle-type and double-sided sensors in the presence of the centrifugal force have been investigated. The nonlinear governing equations are solved and the obtained results are compared with the numerical solution. The influences of the van der Waals force, geometric parameters, angular speed, and size phenomenon on the instability performance have been demonstrated.