Investigation of a vacuum packaged MEMS gyroscope architecture's temperature robustness

摘要

A novel method is investigated in this paper to estimate the temperature's influence upon the resonant frequency (RESF) and quality factor (Q) of a vacuum packaged Micro-Electro-Mechanical-System (MEMS) gyroscope, which can give suggestions to improve the architecture's temperature robustness. The dual-mass decoupled gyroscope's architecture is introduced, and the drive and sense modes' mechanical character are analyzed. The models of RESF and damping are established, and the influence factors are investigated. Four samples are tested and the results indicate that the models can estimate and evaluate the tendency of the RESF and Q in different temperature. The investigation also considers the Young Modulus is the dominate element influencing RESF and increasing the thickness and width of the U-shaped spring can decrease this influence; Q is impacted mainly by the air viscosity coefficient and ambient pressure. The errors of the models are caused by manufacture error and the air getter's influence.