Mapping the elastic modulus of a surface with a NanoScan 3D scanning microscope

摘要

The possibility of mapping the elasticity modulus during scanning of the material surface with a piezoresonance probe is proposed. An analytical model is proposed that describes the force of an elastic interaction between the surface and an indenter in the form of a truncated cone as a function of a displacement. Within the framework of this model, dependences were obtained that allow the elasticity-modulus value to be determined, provided that the data on the average force of a semicontact interaction, the amplitude, and the frequency of probe resonance oscillations are available. The obtained dependences were used for mapping the elasticity modulus of the boundaries of deposited aluminum and copper films on glass, as well as for a TGZ2 test structure. Experiments were performed using a NanoScan 3D scanning nanohardness tester, and a resolution of 0.2 mu m was attained. This technique is applicable to materials that allow only an elastic deformation and can be used in instruments that can operate in a range of contact forces providing predominantly elastic deformations.