METHOD OF MAPPING SURFACES IN AN OPTICAL ULTRARESOLVING SCANNING MICROSCOPE AND OPTICAL ULTRARESOLVING SCANNING MICROSCOPE AS SUCH

摘要

1. The method of surface mapping in a super-resolving scanning optical microscope consists in the following: A laser light beam is divided into two beams: the object beam and the reference beam. The object beam is focused and the examined object is scanned. The reflected object beam of light is subjected to interference with the reference beam. The obtained interference pattern is enlarged, subjected to detection and analysed. It is characterised in that optical vortices with known characteristics are produced in the object beam of laser light. The beam is then divided into two beams. The object beam is focused and the examined object is scanned. The reflected object beam of light is subjected to interference with the reference beam. The obtained interference pattern is enlarged, subjected to detection and analysed. Changes in the location and geometry of optical vortices in the reflected object beam are determined and the topography of the examined object is mapped.