Assembly and Fabrication of Single-Wall Carbon Nanotube Field Effect Transistor Using Dielectrophoresis Method

摘要

On account of their sizes and unique properties, single-wall carbon nanotubes are candidates for a number of building blocks in nanoscale electronics. With respect to the assembly of carbon nanotube field effect transistor, the dielectrophoresis technology is adopted, which assembles SWCNTs between the microelectrodes, SWCNTs are affected by the electrophoretic force which is carried out by the related theoretical analysis in a nonuniform electric field. The driving electric field of dielectrophoresis is simulated by the comsol software. According to the simulation results, a number of the experiments are done. The applied alternating current voltage has a frequency of 2 MHz and an amplitude of 10 V. It turns out that the required experimental parameters of the efficient assembly of SWCNT are obtained. AFM scanning and electrical properties of SWCNTs show that the method can achieve the effective assembly of carbon nanotube field effect transistor. SWCNTs are driven in the microelectrode gap, having a good arrangement of uniform orientation and assembly results, and proportional to the arrangement density along the electrode width direction and the duration of DEP. As a result, it also provides an effective method of assembly and fabrication for other one-dimensional nanomaterials assembly of nanoelectronic devices.