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首页> 外文期刊>Infrared physics and technology >High efficiency antireflection coating in MWIR region (3.6-4.9 μm)simultaneously effective for Germanium and Silicon optics
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High efficiency antireflection coating in MWIR region (3.6-4.9 μm)simultaneously effective for Germanium and Silicon optics

机译:MWIR区域(3.6-4.9μm)的高效抗反射涂层同时对锗和硅光学器件有效

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Antireflection coatings have critical importance in thermal imaging system working in MWIR region (3-5 pm) since optics of high refractive index materials are used. Germanium (Ge) and Silicon (Si) optics areused extensively in the MWIR thermal systems. In this paper a study has been carried out on the designand fabrication of multi-substrate antireflection coating effective for Germanium and Silicon optics inMWIR (3.6-4.9 pm) region. The wave band 3.6-4.9 pm is chosen for the reported work because detectorsystem used in MWIR region has a band selection filter effective in the same wavelength region andatmospheric transmission window in MWIR region is effective in 3-5 pm spectral band. Comprehensivesearch method was used to design the multilayer stack on the substrate. The coating materials used in thedesign were Germanium (Ge), Hafnium oxide (Hf02) and Y-Ba-Fluoride (IR-F625). The fabrication of coat-ing was made in a coating plant fitted with Cryo pump system and residual gas analyzer (RGA). The evap-oration was carried out at high vacuum (2-6 x 10~(-6)mbar) with the help of electron beam gun systemand layer thicknesses were measured with crystal monitor. The result achieved for the antireflectioncoating was 98.5% average transmission in 3.6-4.9 pm band for Germanium and Silicon optics. This workwill be helpful in reducing the plant operation time, material and power consumption, as two differentkinds of optics are simultaneously coated in a single coating cycle.
机译:由于使用了高折射率材料的光学器件,抗反射涂层在MWIR区域(3-5 pm)的热成像系统中至关重要。锗(Ge)和硅(Si)光学器件广泛用于MWIR热系统。在本文中,已经对在MWIR(3.6-4.9 pm)区域有效用于锗和硅光学的多层抗反射涂层的设计和制造进行了研究。之所以选择3.6-4.9 pm波段用于报告工作,是因为MWIR区域中使用的检测器系统具有在相同波长区域有效的频带选择滤波器,并且MWIR区域中的大气传输窗口在3-5 pm光谱频带中有效。综合研究方法被用来设计在基板上的多层堆叠。设计中使用的涂层材料为锗(Ge),氧化Ha(HfO2)和Y-Ba-氟化物(IR-F625)。涂层的制造是在配有低温泵系统和残留气体分析仪(RGA)的涂层工厂中进行的。借助于电子束枪系统在高真空(2-6 x 10〜(-6)mbar)下进行蒸发,并用晶体监测仪测量层厚。对于锗和硅光学元件,抗反射涂层的结果是在3.6-4.9 pm波段的平均透射率为98.5%。这项工作将有助于减少工厂的运行时间,减少材料和降低能耗,因为两种不同类型的光学元件可以在一个镀膜周期中同时镀膜。

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