Design and experiment of spectrometer based on scanning micro-grating integrating with angle sensor

摘要

A compact, low cost, high speed, non-destructive testing NIR (near infrared) spectrometer optical system based on MOEMS grating device is developed. The MOEMS grating works as the prismatic element and wavelength scanning element in our optical system. The MOEMS grating enables the design of compact grating spectrometers capable of acquiring full spectra using a single detector element. This MOEMS grating is driven by electromagnetic force and integrated with angle sensor which used to monitored deflection angle while the grating working. Comparing with the traditional spectral system, there is a new structure with a single detector and worked at high frequency. With the characteristics of MOEMS grating, the structure of the spectrometer system is proposed. After calculating the parameters of the optical path, ZEMAX optical software is used to simulate the system. According the ZEMAX output file of the 3D model, the prototype is designed by SolidWorks rapidly, fabricated. Designed for a wavelength range between 800 nm and 1500 nm, the spectrometer optical system features a spectral resolution of 16 nm with the volume of 97 mm × 81.7 mm × 81 mm. For the purpose of reduce modulated effect of sinusoidal rotation, spectral intensity of the different wavelength should be compensated by software method in the further. The system satisfies the demand of NIR micro-spectrometer with a single detector.