Sensor, for scanning probe microscopy, has cylindrical shaped nano-structure formed on microstructure designed as substrate, by electron beam or ion beam, in additive and/or subtractive process and arranged perpendicular to base of pyramid

摘要

The sensor has a cylindrical shaped nano-structure formed on a microstructure (15) designed as a substrate (1), by an electron beam or an ion beam, in an additive and/or subtractive process. The structure (15) is additively processed in a processing sequence by electron beam deposition or ion beam deposition or subtractively processed by a chemical or physical etching technique. The nano-structure is arranged perpendicular to a base of a pyramid.