MIS Sensors for Hydrogen Content Measurements in 10~(-4)-10~2 Volume Percent Range

摘要

New types of MIS (metal-insulator-semiconductor) sensors enabling direct measurements of hydrogen content in a wider range (up to 10 vol %) are developed. Using these sensors with special sampling techniques allows to measure hydrogen content up to 100 vol %. New class of hydrogen analyzers for various applications in hydrogen power engineering could be designed on the basis of new MIS sensors.