The study of pressure measurement techniques and devices in the range of 10(exp -1) to 10(exp -5) torr (2 millipsi to 0.2 micropsi)

摘要

The atmospheric pressure range was studied in a region where conventional pressure sensing devices do not provide meaningful measurements. However, a hot filament gauge was developed and miniaturized which will measure the pressure in the 10(exp -1) to 10(exp -5) torr (2 millipsi to 0.2 micropsi) region, hence the name Micropsi gauge. Laboratory studies were made comparing the currently available devices with the newly developed miniature low power 'Micropsi' pressure sensor.