Time-of-flight optical ranging system based on time-correlated single-photon counting

摘要

The design and implementation of a prototype time-of-flight optical ranging system based on the time-correlated single-photon-counting technique are described. The sensor is characterized in terms of its longitudinal and transverse spatial resolution, single-point measurement time, and long-term stability. The system has been operated at stand-off distances of 0.5-5 m, has a depth repeatability of <30 mu m, and has a lateral spatial resolution of <500 mu m. (C) 1998 Optical Society of America. OCIS codes: 120.3930, 150.5670, 150.6910, 280.3400. [References: 11]