Controlling solidification front shape and thermal stress in growing quasi-single-crystal silicon ingots: Process design for seeded directional solidification

摘要

To control the solidification front shape and thermal stress in the growing silicon ingot and reduce the small-grain region at its periphery, a moving insulation partition block was designed in an industrial seeded directional solidification furnace for quasi-single-crystal silicon ingots. We propose several moving process designs of the partition block. A transient global model of heat transfer in which all types of heat transfer are included was established to investigate the thermal field, solidification front evolution, and thermal stress in the growing ingot. Corresponding experiments were conducted to validate the simulation results through the relationship between solidification front shape and the small-grain region. It was found that the moving process can significantly influence the thermal field, solidification front shape, and thermal stress in the growing ingot during the solidification process. The moving partition block design is feasible to control the solidification front shape and reduce the small-grain region at the periphery of the solidified ingot. A favorable moving process design of the partition block was obtained that can simultaneously achieve a small small-grain region and low thermal stress in the solidified ingot. (C) 2015 Elsevier Ltd. All rights reserved.